• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
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    • 专利摘要:
    PURPOSE: To provide non-volatile memories which permit integration to a higher scale even if scaling of peripheral transistors is difficult. CONSTITUTION: A flash memory having hierarchical bit line configuration is provided with column reset/bit line test transistor regions 4a commonly to a plurality of cell blocks 3a sharing upper layer bit lines MBL0, MBL1, etc., so that data lines DL connected with sense amplifiers can be selectively disconnected from the upper layer bit lines.
    公开号:KR20040023479A
    申请号:KR1020030019802
    申请日:2003-03-29
    公开日:2004-03-18
    发明作者:단자와도루；우메자와아끼라
    申请人:가부시끼가이샤 도시바；
    IPC主号:
    专利说明:

    Nonvolatile Semiconductor Memory {NONVOLATILE SEMICONDUCTOR MEMORY}
    [38] The present invention relates to a nonvolatile semiconductor memory, and more particularly, to a semiconductor memory having a hierarchical bit line structure such as a semiconductor memory used in a NOR type flash memory.
    [39] One nonvolatile semiconductor memory is a NOR type flash memory.
    [40] 9 is an equivalent circuit diagram showing a portion of a memory cell array in a NOR type flash memory.
    [41] Memory cell transistors (hereinafter referred to as "cell transistors") are arranged in a matrix on a semiconductor substrate, and control gates of the cell transistors are connected to corresponding word lines WL0 to WLn. Bit lines BL0 to BLm are provided on the CVD oxide film of the semiconductor substrate where the cell transistors are formed. The drains of the cell transistors are connected to the corresponding bit lines BL0 to BLm.
    [42] FIG. 10 illustrates a cross-sectional view of the cell transistor of FIG. 9. The cell transistor has a MOSFET structure in which a floating gate is formed on a semiconductor substrate through a tunnel oxide film, and a control gate is formed on the floating gate through an inter-gate insulating film. The threshold voltage of the cell transistor is changed by the number of electrons stored in the floating gate.
    [43] FIG. 11 shows the relationship between the control gate voltage and the drain current of the cell transistor shown in FIG. 10.
    [44] A state in which a relatively large number of electrons are stored in the floating gate and the threshold voltage Vt of the cell transistor is high is defined as "0" data. In contrast, a state where relatively few electrons are stored in the floating gate and the threshold voltage Vt is low is defined as "1" data.
    [45] The voltage (word line voltage) applied to the control gate of the cell transistor is changed by the operation mode. Table 1 shows examples of bias conditions for data read, data write, and data erase for a cell transistor. Where Vg is the control gate voltage, Vd is the drain voltage, and Vs is the source voltage.
    [46] (Reading) (program) (elimination) Vg 5 V 9 V -7V Vd 1 V 5 V ("0"), 0 V ("1") Floating Vs 0 V 0 V 10 V
    [47] As shown in Table 1, in the case of data reading, a voltage of 0 V is applied to the source, a voltage of 1 V is applied to the drain (bit line connected to the cell transistor), and a read voltage of 5 V is applied to the control gate. It is determined whether a predetermined cell current flows.
    [48] Data writing is done every bit. In writing data, a voltage of 0 V is applied to the source and a voltage of 9 V is applied to the control gate. When " 0 " data is written, as a voltage of 5 V is applied to the drain, high-energy electrons generated by the channel thermoelectron phenomenon are injected into the floating gate, and the threshold voltage Vt changes. When " 1 " data is held, as a voltage of 0 V is applied to the drain, injection of electrons to the floating gate does not occur, and therefore, no change in the threshold voltage Vt occurs.
    [49] Data erasing is collectively performed for a plurality of cell transistors having a common source and a P-well. In erasing data, a voltage of 10 V is applied to the source, an erase voltage of -7 V is applied to the floating gate, and the drain is set to the floating state. As a result, electrons flow into the substrate from the floating gate by the F-N tunnel phenomenon, and all target cell transistors for erasing are set to "1" data.
    [50] To verify the writing and erasing of data for the cell transistors, write verification and erase verification are performed.
    [51] At the time of write verification, reading of "0" is performed in such a manner that a higher voltage Vpv is applied to the control gate of the cell transistor compared to the voltage at the time of reading. Write and write verification are performed one after another, and the write operation then ends when all target cell transistors for writing are set to " 0 ".
    [52] During erasure verification, a read of " 1 " is performed in such a manner that a lower voltage Vev is applied to the control gate of the cell transistor compared to the voltage at the time of reading. Erasing and erasing verification are performed one after another, and then the erasing operation ends when the cell current Icell of the target cell transistor for erasing is sufficiently secured (if all the target cell transistors for erasing are set to "1").
    [53] 12 shows a portion of a conventional NOR type flash memory in which the memory core portion has a hierarchical bit line structure.
    [54] In Fig. 12, reference numeral 1 denotes a cell transistor region, 2 denotes a lower column gate region, 3 denotes a cell block, 4 denotes a column reset transistor region, and 5 denotes an upper column gate region.
    [55] That is, the memory cell array having the cell transistors QC arranged in a matrix shape is divided into a plurality of cell blocks 3 in the longitudinal direction (ie, column direction) of the upper bit lines MBL0, MBL1,... do. The upper bit lines MBL0, MBL1,... Are common to the plurality of cell blocks 3.
    [56] An operation such as reading and writing is performed while selecting one of the plurality of cell blocks 3.
    [57] In each cell block 3, a plurality of lower bit lines BiBL0, BiBL1, BiBL2, BiBL3, ... (i = 0, 1, ...) are provided to extend in the column direction of the memory cell array. do. Drains of the plurality of cell transistors QC are connected to corresponding ones of the lower bit lines BiBL0, BiBL1, BiBL2, BiBL3, .... Also in each cell block 3, a plurality of word lines BiWL0, BiWL1, BiWL2, ... (i = 0, 1, ...) are provided to extend in the row direction of the memory cell array. The control gates of the plurality of cell transistors QC are connected to corresponding ones of the word lines BiWL0, BiWL1, BiWL2,...
    [58] Two adjacent lower bit lines [(BiBL0, BiBL1), (BiBL2, BiBL3), ...] among the lower bit lines BiBL0, BiBL1, BiBL2, BiBL3, ... form a pair. Two adjacent lower bit lines [(BiBL0, BiBL1), (BiBL2, BiBL3), ...] are connected to the upper bit lines MLB0 and MLB1 through respective column select transistors (lower column gates) QLCG. , ...) are commonly connected to the corresponding ones. Each of the column select transistors QLCG is controlled by a signal of the corresponding one of the column select lines BiH0, BiH1, ... (i = 0, 1, ...). The lower bit lines BiBL0, BiBL1, BiBL2, BiBL3, ... are composed of the metal wiring of the first single layer and the upper bit lines MLB0, MLB1, ... are the metal wiring of the second single layer. It is composed.
    [59] In each cell block 3, the drain of the column reset transistor QCRT is connected to the upper bit lines MLB0, MLB1, .... In the column reset transistor QCRT, the source of the column reset transistor QCRT is connected to the reset voltage line VRSTi (i = 0, 1, ...), and the gate of the column reset transistor QCRT is the column reset line. Is connected to [COLRSTi (i = 0, 1, ...)].
    [60] Each of the upper bit lines MLB0, MLB1, ... is connected to the data line DL and the sense amplifier 15 through a corresponding one of the upper bit line select transistors (upper column gates) QUCG. The upper column select lines [XiD0, XiD1, ... (i = 0, 1, ...)] are connected to the gates of the respective upper bit line select transistors QUCG.
    [61] As will be described later, the column reset transistor QCRT resets the charge of the bit lines after the read operation and also applies a stress voltage to the drain of the cell transistor through the bit lines during the drain stress test (bit line test). The column reset transistor QCRT is a column reset and bit line test transistor.
    [62] FIG. 15 is an example of a circuit diagram of a sense amplifier of the memory shown in FIG. 12.
    [63] As illustrated in FIG. 15, the sense amplifier compares the reference current Iref of the reference cell flowing through the reference data line RDL with the cell current Iload of the memory cell flowing through the cell data line DL. The data Dout of the memory cell is output according to the comparison result.
    [64] FIG. 13A shows an example of an operation waveform in the case of a read operation in the memory core shown in FIG. 12.
    [65] For example, when the word line B0WL0 is selected and the column line B0H0 is activated (“H” level) so that the lower column gate QLCG is selected, the corresponding cell transistor in the cell block 3 of the block number 0 is selected. Is selected. The voltage according to the data of the selected cell transistor is displayed on the upper bit line MBL0 through the lower bit line B0BL0. At this time, when the column gate select line X0D0 is at the "H" level and thus the upper bit line MBL0 is electrically connected to the data line DL, the sense amplifier 15 senses the voltage of the data line DL. And amplify and output cell data according to the comparison result.
    [66] When the read operation is completed, the column reset signal line COLRST0 corresponding to the selected cell block 3 of the block number 0 is activated ("H" level) and the selected lower column gate QLCG is kept active. The charge of the bit line MBL0 is discharged through the column reset transistor QCRT. At this time, since the column reset voltage line VRST0 of the source of the column reset transistor QCRT is set to 0V, the potential of the upper bit line MBL0 is reset to 0V.
    [67] 13C is an example of a circuit diagram for generating a bit line reset signal COLRST0. This signal generation circuit includes an inverter and a NOR circuit. The inverter receives the address transition detection signal ADT and inverts the logic level of the address transition detection signal ADT. The NOR circuit receives the inverted signal output and the block address inputs BLKADD_0 and BLKADD_1 from the inverter to generate the bit line reset signal COLRST0.
    [68] The transition of the internal address signals such as the block address signals BLKADD_0 and BLKADD_1 is completed during the "H" level period.
    [69] Since the target cell block, that is, the cell block selected by the block select signal BLK0, is in the non-selected state, the bit line reset signal COLRST0 is at the "H" level until the time T1. Therefore, bit lines in the target cell block are connected to ground. The target cell block is placed in the selection state for a period from time T1 to time T2, and the bit line reset signal COLRST0 is at the "L" level. Thus, reading of data from the memory cells is performed. After the time T2, since the target cell block is set back to the non-selected state and the bit line reset signal COLRST0 is at the "H" level, all the bit lines in the target cell block are connected to ground.
    [70] FIG. 13B shows an example of an operating waveform in the case of a drain stress test (bit line test) in the memory core shown in FIG. 12.
    [71] In the state where the stress voltage is applied to the drains of the cell transistors and these cell transistors are set to "0" data, the threshold voltage after the test of the defective cell transistors in the drain-side tunnel oxide film portion is lowered. The yield can be increased by performing redundancy relief for these defective cell transistors.
    [72] In this example, with all cell transistors in one or the plurality of cell blocks 3 as targets of the test set in advance to "0" data, the lower column gates QLCG in the selected cell block 3 are It is turned on and all upper column gates QUCG are turned off. At this time, the column reset voltage line VRST is set to a voltage of, for example, 5V at the time of writing, and the voltage of 5V is the stress voltage of all the cell transistors in the cell block 3 selected from the source of the column reset transistor QCRT. Simultaneous application to the drain shortens the test time.
    [73] Since the gate width of the column reset transistor QCRT is sufficiently small, even if there is a faulty leak column in the selected cell block 3, the potential of the other bit lines is hardly affected by the faulty leak column.
    [74] On the other hand, with the development of microprocessing technology, the size of transistors has been reduced. However, scaling of peripheral transistors such as the column reset transistor QCRT is difficult because the thickness of the tunnel oxide film of the cell transistor is not scaled down to ensure reliability.
    [75] For example, FIG. 14 shows the arrangement before and after scaling of cell transistors (cell array) in the cell array region and column reset transistors (reset transistor) in the column reset transistor region.
    [76] In the post-scaling arrangement, even though the cell transistors in the cell array are arranged at the bit line pitch, the column reset transistors in the column reset transistor region cannot be arranged at the bit line pitch. For this reason, the length L of the column reset transistor region is increased, and as a result, high integration of the semiconductor memory becomes difficult.
    [77] In Fig. 14, an "active region" is an active region (drain, source, channel region of a MOSFET) in a semiconductor substrate. "Gate" is the gate electrode of the MOSFET. "Conductor wiring" is conductor wiring connecting the column select cell transistors in the cell array region to the reset transistors in the column reset transistor region.
    [78] As described above, there is a disadvantage in the conventional nonvolatile semiconductor memory. That is, when scaling of peripheral transistors such as column reset transistors becomes difficult and column reset transistors cannot be arranged at bit line pitch, the column reset transistor region becomes large, and as a result, high integration becomes difficult.
    [79] According to an aspect of the present invention, there is provided a memory device comprising: a first nonvolatile memory cell and a second nonvolatile memory cell each holding data; First and second bit lines connected corresponding to the first and second nonvolatile memory cells; First and second column select transistors corresponding to the first and second bit lines; A first column reset and bit line test transistor having a drain connected to a first node to which the first and second column select transistors are commonly connected; A sense amplifier selectively connected to the first node to sense and amplify cell data appearing on the first node; And resetting the first column after data of one of the first and second nonvolatile memory cells selected by turning on one of the first and second column select transistors is sensed by the sense amplifier during a first time period. And turn on a bit line test transistor to reset the potential of the first node, wherein the first and second column select transistors and the first column reset and bit line test transistors are turned on simultaneously during a second time period. A nonvolatile semiconductor memory including control circuitry to control the sense amplifier to be electrically isolated from the first node during operation.
    [80] According to another aspect of the invention, each source is connected to a first common node, each of the first nonvolatile memory cell and the second nonvolatile memory cell for holding data; A third nonvolatile memory cell and a fourth nonvolatile memory cell, each source being connected to a second common node, each of which holds data; First to fourth lower bit lines connected corresponding to the first to fourth nonvolatile memory cells; First to fourth lower column select transistors having one end connected to the first to fourth lower bit lines; A first upper bit line commonly connected to the other ends of each of the first and second lower column select transistors; A second upper bit line commonly connected to the other ends of each of the third and fourth lower column select transistors; First and second column reset and bit line test transistors having drains connected to the first and second upper bit lines; A sense amplifier selectively connected to one of the first and second upper bit lines to sense and amplify cell data appearing on one of the first and second upper bit lines; And after at least one of the first to fourth nonvolatile memory cells selected by turning on at least one of the first to fourth lower column select transistors is sensed by the sense amplifier during a read operation time of cell data. And turn on one of the first and second column reset and bit line test transistors to reset the potential of one of the first and second upper bit lines, and the first to fourth lower column select transistors. And control circuitry to electrically disconnect the sense amplifier from the first and second upper bit lines while the first and second column reset and bit line test transistors are turned on simultaneously during a bit line test time. A nonvolatile semiconductor memory is provided.
    [81] According to another aspect of the invention, each source is connected to a first common node, each of the first nonvolatile memory cell and the second nonvolatile memory cell for holding data; A third nonvolatile memory cell and a fourth nonvolatile memory cell, each source being connected to a second common node, each of which holds data; First to fourth lower bit lines connected corresponding to the first to fourth nonvolatile memory cells; First to fourth lower column select transistors having one end connected to the first to fourth lower bit lines; A first upper bit line connected to the other ends of the first to fourth lower column select transistors; A first column reset and bit line test transistor having a drain connected to the first upper bit line; A sense amplifier selectively connected to the first upper bit line to sense and amplify cell data appearing on the first upper bit line; And after at least one of the first to fourth nonvolatile memory cells selected by turning on at least one of the first to fourth lower column select transistors is sensed by the sense amplifier during a data read operation time. Turn on the first column reset and bit line test transistor to reset the potential of the first upper bit line, and control the first to fourth lower column select transistors and the first column reset and bit line test transistors. A nonvolatile semiconductor memory is provided that includes control circuitry to electrically isolate the sense amplifier from the first upper bit line while is simultaneously turned on during a bit line test time.
    [82] According to still another aspect of the present invention, a memory cell array including a plurality of nonvolatile memory cells arranged in a matrix form, each of the nonvolatile memory cells includes a stacked gate in which a floating gate and a control gate are stacked. The memory cell array is divided into a plurality of cell blocks in a column direction; First and second lower bit lines provided in each of the cell blocks, the first and second lower bit lines correspondingly connected to the first and second nonvolatile memory cells which hold data; First and second column select transistors provided in each of the cell blocks, the first and second column select transistors being connected to correspond to the first and second lower bit lines; An upper bit line commonly provided for the plurality of cell blocks in a column direction, wherein the first and second column select transistors in the cell blocks are commonly connected to the upper bit line; A column reset and bit line test transistor having a drain node connected to the upper bit line; A sense amplifier selectively connected to the upper bit line to sense and amplify data appearing on the upper bit line; And data of one of the first and second nonvolatile memory cells selected by turning on one of the first and second sub-column selection transistors in a selected cell block of the plurality of cell blocks during the data read operation time. After being sensed by the sense amplifier through one upper bit line corresponding to the selected cell block, the column reset and bit line test transistors connected to the one upper bit line are turned on to apply the potential of the upper bit line. And reset the column reset and bit lines connected to the first and second lower column select transistors in the selected cell block and the one upper bit line corresponding to the selected cell block among the plurality of cell blocks. The sense amplifier while the test transistor is simultaneously turned on during the bit line test The non-volatile semiconductor memory is provided with a control circuit for controlling to electrically isolated from the said one of the upper bit line.
    [83] According to still another aspect of the present invention, a memory cell array including a plurality of nonvolatile memory cells arranged in a matrix form, each of the nonvolatile memory cells includes a stacked gate in which a floating gate and a control gate are stacked. The memory cell array is divided into a plurality of cell blocks in a row direction and a column direction; First and second lower bit lines provided in each of the cell blocks, the first and second lower bit lines correspondingly connected to the first and second nonvolatile memory cells which hold data; First and second column select transistors provided in each of the cell blocks, the first and second column select transistors being connected to correspond to the first and second lower bit lines; A plurality of upper bit lines provided in common for the plurality of cell blocks and correspondingly corresponding to columns; wherein the first and second column select transistors in cell blocks within the same column are the plurality of upper bit lines. Is commonly connected to the corresponding one; A plurality of column reset and bit line test transistors, wherein a drain node of each of the column reset and bit line test transistors is connected to a corresponding one of the plurality of upper bit lines; A sense amplifier selectively connected to the plurality of upper bit lines to sense and amplify data appearing on the upper bit lines; And data of one of the first and second nonvolatile memory cells selected by turning on one of the first and second sub-column selection transistors in a selected cell block of the plurality of cell blocks during a read operation time of cell data. After being sensed by the sense amplifier through one upper bit line corresponding to the selected cell block, the column reset and bit line test transistors connected to the one upper bit line are turned on to turn on the potential of the upper bit line. And reset the column and bits connected to the first and second lower column select transistors in the selected cell block and the one upper bit line corresponding to the selected cell block among the plurality of cell blocks. The sense increase while the line test transistors are turned on simultaneously during the bit line test. Group is a non-volatile semiconductor memory is provided with a control circuit for controlling to electrically isolated from the top bit line of the one.
    [1] BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram schematically showing the overall arrangement of a NOR type flash memory according to a first embodiment of the present invention.
    [2] 2 is an equivalent circuit diagram showing a portion of a memory core portion having a hierarchical bit line structure in FIG.
    [3] FIG. 3A is a waveform diagram showing an example of a read operation (read) to the memory core portion shown in FIG. 2; FIG.
    [4] 3B is a waveform diagram showing an example of the operation during a bit line test (drain stress test) for the memory core portion shown in FIG. 2;
    [5] Fig. 4 is an equivalent circuit diagram showing a part of the structure of the memory core portion in the NOR type flash memory according to the second embodiment of the present invention.
    [6] FIG. 5 is a waveform diagram showing an example of operation during bit line test for the memory core portion shown in FIG. 4; FIG.
    [7] FIG. 6 is a waveform diagram showing another example of the operation during the bit line test for the memory core unit shown in FIG. 4; FIG.
    [8] FIG. 7 is a waveform diagram showing another example of the operation during the bit line test for the memory core unit shown in FIG. 4; FIG.
    [9] FIG. 8 is a waveform diagram showing another example of the operation during the bit line test for the memory core portion shown in FIG. 4; FIG.
    [10] Fig. 9 is an equivalent circuit diagram showing a part of a memory cell array in a NOR type flash memory.
    [11] FIG. 10 is a sectional view of the cell transistor shown in FIG. 9; FIG.
    [12] FIG. 11 is a characteristic diagram showing a relationship between a control gate voltage and a drain voltage of the cell transistor shown in FIG. 10.
    [13] Fig. 12 is a diagram showing a part of a conventional NOR type flash memory when the memory core portion has a hierarchical bit line structure.
    [14] FIG. 13A is a waveform diagram showing an example of a read operation (read) to the memory core portion shown in FIG. 12; FIG.
    [15] FIG. 13B is a waveform diagram illustrating an example of operation during a bit line test (drain stress test) for the memory core portion shown in FIG. 12. FIG.
    [16] 13C is an example of a circuit diagram for generating a bit line reset signal COLRST0.
    [17] FIG. 14 is a pattern diagram showing an arrangement configuration before and after scaling of cell transistors (cell array) in the cell array region and column reset transistors (reset transistor) in the column reset transistor region in the memory core portion shown in FIG. 12; FIG.
    [18] FIG. 15 is an example of a circuit diagram of the sense amplifier 15 of the memory shown in FIG. 12. FIG.
    [19] <Explanation of symbols for the main parts of the drawings>
    [20] 1: cell transistor region
    [21] 2: lower column gate area
    [22] 3a: cell block
    [23] 4a: column reset transistor region
    [24] 5: upper column gate area
    [25] 10: memory cell array
    [26] 11: low decoder
    [27] 12: block decoder
    [28] 13: column gate / bit line reset circuit
    [29] 14: column decoder
    [30] 15: sense amplifier
    [31] 16: program circuit
    [32] 17: charge pump
    [33] 18: voltage switch
    [34] 19: I / O buffer
    [35] 20: address buffer
    [36] 21: command register
    [37] 22: controller
    [84] Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
    [85] (First embodiment)
    [86] Fig. 1 is a block diagram schematically showing the overall arrangement of a NOR type flash memory according to a first embodiment of the present invention.
    [87] The memory cell array 10 has a hierarchical bit line structure as described below, and the cell transistors are arranged in a matrix in the memory cell array 10.
    [88] The row decoder 11 selects a word line of the memory cell array 10, the block decoder 12 selects a block of the memory cell array 10, and the column gate / bit line reset circuit 13 selects a memory cell. The bit line of the array 10 is selected and the bit line voltage is reset.
    [89] The column decoder 14 controls the column gate / bit line reset circuit 13. The sense amplifier 15 senses and amplifies the voltage of the bit line through the column gate and the data line. Data written to the cell transistor is supplied to the bit line through the data line and the column gate by the program circuit 16.
    [90] The charge pump circuit 17 generates various voltages from the power supply voltage, such as high voltage and medium voltage for writing, high voltage for erasing, and high voltage for reading, and the output voltage of the charge pump circuit 17 is a bit line and a voltage. Supplied to the switch circuit 18.
    [91] The voltage switch circuit 18 selects the output voltage of the charge pump circuit 17 and supplies it to the row decoder 11 and the column decoder 14 as operating power.
    [92] The data input / output buffer (IO buffer) 19 controls the input of data from the outside and the output of data such as read data from the inside. The address buffer 20 amplifies the address signal input from the outside and supplies the amplified address signal to the row decoder 11, the block decoder 12, and the column decoder 14.
    [93] The command register 21 temporarily holds a command input from the outside through the data input / output buffer 19 and an address signal supplied from the address buffer 20. The controller 22 decodes the command supplied from the command register 21 to generate various control signals.
    [94] Using the circuits, data read, data rewrite, write verify, read verify, and erase verify are performed on the memory cell array 10, and data such as write data and read data through the data input / output buffer 19 is performed. The transmission of is performed.
    [95] FIG. 2 is an equivalent circuit diagram illustrating a portion of a memory core unit having a hierarchical bit line structure in FIG. 1. The memory core portion has a NOR type memory cell array in which a plurality of memory cells having stacked gates in which floating gates and control gates are stacked are arranged in a matrix. Compared with the conventional memory core shown in FIG. 12, in FIG. 2, the arrangement of the cell block 3a and the column reset transistor QCRT and the upper bit line (main bit line) (MBL0, MBL1, ...) The connection with has changed. In Fig. 2, the same parts as in Fig. 12 are denoted by the same reference numerals.
    [96] In FIG. 2, reference numeral 1 denotes a cell transistor region, 2 denotes a lower column gate region, 3a denotes a cell block, 4a denotes a column reset transistor region, and 5 denotes an upper column gate region.
    [97] That is, the memory cell array having the cell transistors QC arranged in a matrix shape is divided into a plurality of cell blocks 3a in the longitudinal direction (ie, column direction) of the upper bit lines MBL0, MBL1,... . The upper bit lines MBL0, MBL1, ... are common to the plurality of cell blocks 3a.
    [98] An operation such as reading and writing is performed while selecting one of the plurality of cell blocks 3a, and a bit line test operation is performed while selecting any number of cell blocks 3a.
    [99] In each cell block 3a, a plurality of lower bit lines BiBL0, BiBL1, BiBL2, BiBL3, ... (i = 0, 1, ...) are provided to extend in the column direction of the memory cell array. do. Drains of the plurality of cell transistors QC are connected to corresponding ones of the lower bit lines BiBL0, BiBL1, BiBL2, BiBL3, .... Also in each cell block 3a, a plurality of word lines BiWL0, BiWL1, BiWL2, ... (i = 0, 1, ...) are provided to extend in the row direction of the memory cell array. The control gates of the plurality of cell transistors QC are connected to corresponding ones of the word lines BiWL0, BiWL1, BiWL2,... Two adjacent lower bit lines [(BiBL0, BiBL1), (BiBL2, BiBL3), ...] among the lower bit lines BiBL0, BiBL1, BiBL2, BiBL3, ... form a pair. Two adjacent lower bit lines [(BiBL0, BiBL1), (BiBL2, BiBL3), ...] are connected to the upper bit lines MLB0 and MLB1 through respective column select transistors (lower column gates) QLCG. , ...) are commonly connected to the corresponding ones. Each of the column select transistors QLCG is controlled by a signal of the corresponding one of the column select lines BiH0, BiH1, ... (i = 0, 1, ...). The lower bit lines BiBL0, BiBL1, BiBL2, BiBL3, ... are composed of the metal wiring of the first single layer and the upper bit lines MLB0, MLB1, ... are the metal wiring of the second single layer. It is composed.
    [100] Each of the upper bit lines MLB0, MLB1, ... is connected to the data line DL and the sense amplifier 15 through a corresponding one of the upper bit line select transistors (upper column gates) QUCG. The upper column select lines [XiD0, XiD1, ... (i = 0, 1, ...)] are connected to the gates of the respective upper bit line select transistors QUCG. A sense amplifier as shown in FIG. 15 can be used as the sense amplifier 15 of the memory device shown in FIG.
    [101] Further, each of the upper bit lines MLB0, MLB1, ... is connected to the drain of the corresponding one of the column reset transistors QCRT. The source of each of the column reset transistors QCRT is connected to the reset voltage line VRST, and the gate of each of the column reset transistors QCRT is connected to the column reset signal line COLRST.
    [102] In this embodiment, the column reset transistors QCRT connected to the upper bit lines MBL0, MBL1,... Are arranged between the arrangement configuration of the cell blocks 3a and the arrangement configuration of the upper column gate QUCG. Is provided between.
    [103] As will be described later, the column reset transistor QCRT resets the charge of the bit lines after the read operation and also applies a stress voltage to the drain of the cell transistor through the bit lines during the drain stress test (bit line test). The column reset transistor QCRT is a column reset and bit line test transistor.
    [104] In the arrangement of FIG. 2, the column reset transistor region 4a is provided in common to the plurality of cell blocks 3a as compared with the conventional arrangement described above with reference to FIG. 12. That is, the column reset transistor region 4a is commonly provided for the plurality of cell blocks 3a through which the upper bit lines MBL0, MBL1, ... extend.
    [105] FIG. 3A is a waveform diagram showing an example of a read operation for the memory core portion shown in FIG. 2.
    [106] For example, if word line B0WL0 is selected and column line B0H0 is activated (“H” level) and lower column gate QLCG is selected, the corresponding cell transistor in cell block 3a of block number 0 is selected. Is selected. The voltage according to the data of the selected cell transistor is displayed on the upper bit line MBL0 through the lower bit line B0BL0. At this time, when the column gate select line X0D0 is at the "H" level and thus the upper bit line MBL0 is electrically connected to the data line DL, the sense amplifier 15 senses the voltage of the data line DL. And amplify the cell data.
    [107] When the read operation is terminated, the column reset signal line COLRST0 is activated ("H" level) and the selected lower column gate QLCG remains on-state, so that the upper bit line MBL0 The charge is discharged through the column reset transistor QCRT. At this time, since the column reset voltage line VRST0 of the source of the column reset transistor QCRT is set to 0V, the potential of the upper bit line MBL0 is reset to 0V.
    [108] FIG. 3B is a waveform diagram showing an example of the operation during the drain stress test (bit line test) for the memory core portion shown in FIG. 2.
    [109] With all cell transistors in one or the plurality of cell blocks 3a as targets of the test set to "0" data in advance, all lower column gates QLCG in the selected cell block 3a are turned on. All upper column gates QUCG are turned off.
    [110] In this case, the column reset voltage line VRST is set to a voltage of, for example, 5V at the time of writing, and all of the cell transistors in the cell block 3a selected from the source of the column reset transistor QCRT as the stress voltage. By simultaneously applying to the drain of the test time is shortened.
    [111] Since the gate width of the column reset transistor QCRT is sufficiently small, even if there is a defective leak column in the selected cell block 3a, the potential of the other upper bit lines is hardly affected by the defective leak column.
    [112] In the lower bit lines in the cell blocks in the non-selected state, since the corresponding lower column gates are turned off, no stress voltage is applied to the drains of the cell transistors of the non-selected state cell blocks.
    [113] As described above, in the state where the stress voltage is applied to the drain of the cell transistors in one or the plurality of cell blocks 3a as the target of the drain stress test and these cell transistors are set to "0" data, the drain side The threshold voltage after testing of cell transistors having defects in the tunnel oxide film portion is lowered. The yield can be increased by performing redundancy relief for these defective cell transistors.
    [114] In this embodiment, since only one column reset transistor region 4a is provided for the plurality of cell blocks 3a, even if the cell transistor can be scaled down, even if the peripheral transistors are difficult to shrink, Since it is not necessary to enlarge the reset transistor region 4a, high integration becomes relatively easy.
    [115] The operation of FIGS. 3A and 3B is controlled by the controller shown in FIG. 1.
    [116] (2nd Example)
    [117] Fig. 4 is an equivalent circuit diagram showing a part of the structure of the memory core portion in the NOR type flash memory according to the second embodiment of the present invention.
    [118] Compared with the memory core portion shown in Fig. 2, in the memory core portion of this second embodiment, the memory cell array has a plurality of cell blocks in both the row direction (word line direction) and the column direction (bit line direction). Divided into 3a). The column reset transistor region 4a is divided corresponding to the rows of the memory cell array, and each column reset transistor region 4a may be selected independently of each other.
    [119] According to this arrangement, in the bit line test operation, the selection of each of the cell blocks and the selection of each of the column reset transistors in the column reset transistor region 4a are arbitrarily correlated with each other. In FIG. 4, the same parts as in FIG. 2 are denoted by the same reference numerals as in FIG. 2.
    [120] In the cell block of block number 0, in order to generate a signal of the lower column gate selection lines B0H0 and B0H1 which alternatively select two adjacent lower columns sharing the upper bit line MBL0, the global column gate. The logical product of the signal of the selection line GH0 and the signal of the cell block selection line BLK0 is obtained by the two-input AND circuit 41, and the signal of the global column gate selection line GH1 and the cell block selection line BLK0. The logical product of the signal of &quot;) is obtained by the two-input AND circuit 42.
    [121] In the cell block of block number 1 in the same row as the cell block of block number 0, the lower column gate select lines B1H0 and B1H1 alternatively select two adjacent lower columns that share the upper bit line MBL1. In order to generate a signal of ), The logical product of the signal of the global column gate selection line GH0 and the signal of the cell block selection line BLK1 is obtained by the two-input AND circuit 43, and the global column gate selection line ( The logical product of the signal of GH1 and the signal of the cell block selection line BLK1 is obtained by the two-input AND circuit 44.
    [122] In the cell block of block number 2 in the same column as the cell block of block number 0, the lower column gate select lines B2H0 and B2H1 alternatively select two adjacent lower columns that share the upper bit line MBL0. In order to generate a signal of), the logical product of the signal of the global column gate selection line GH2 and the signal of the cell block selection line BLK2 is obtained by the two-input AND circuit 45, and the global column gate selection line ( The logical product of the signal of GH3 and the signal of the cell block selection line BLK2 is obtained by the two-input AND circuit 46.
    [123] In the cell block of block number 3 in the same row as the cell block of block number 2, the lower column gate select lines B3H0 and B3H1 alternatively select two adjacent lower columns that share the upper bit line MBL1. In order to generate a signal of ), The logical product of the signal of the global column gate selection line GH2 and the signal of the cell block selection line BLK3 is obtained by the two-input AND circuit 47, and the global column gate selection line ( The logical product of the signal of GH3 and the signal of the cell block select line BLK3 is obtained by the two-input AND circuit 48.
    [124] The column reset transistor QCRT connected to the upper bit line MBL0 is the logical product of the signal of the column reset signal line COLRST obtained by the two-input AND circuit 49 and the signal of the cell block select line BLK0. Controlled by the in-column reset signal COLRST0.
    [125] The column reset transistor QCRT connected to the upper bit line MBL1 is the logical product of the signal of the column reset signal line COLRST obtained by the two-input AND circuit 50 and the signal of the cell block select line BLK1. It is controlled by the in-column reset signal COLRST1.
    [126] FIG. 5 is a waveform diagram showing an example of operation during a bit line test (drain stress test) for the memory core portion shown in FIG. 4.
    [127] In the operation of the bit line test shown in FIG. 5, the column reset voltage line VRST is set to a bit line bias voltage of 5V, and the signal of the column reset signal line COLRST is in an active state. In this state, a plurality of cell blocks are selected one by one by allocating one of the global column select lines GH0 to GH3 and one of the block select lines BLK0 to BLK3. All lower bit lines BiBL in the selected cell block are simultaneously selected and the test is performed by applying a bit line bias to all cell transistors QC in the selected cell block through the upper bit line MBL corresponding to the selected cell block. Is performed. This can further shorten the test time than in the bit line test shown in FIG. 3B. While the test in the selected cell blocks is performed, the test for the cell transistors of other cell blocks, that is, unselected cell blocks, cannot be performed.
    [128] The sense amplifier shown in FIG. 15 may be used as the sense amplifier 15 of the memory device shown in FIG.
    [129] The operation of FIG. 5 is controlled by the controller shown in FIG.
    [130] 6 is a waveform diagram illustrating another example of the operation during the bit line test for the memory core unit illustrated in FIG. 4.
    [131] In the operation of the bit line test shown in FIG. 6, the column reset voltage line VRST is set to a bit line bias voltage of 5V, and the signal of the column reset signal line COLRST is in an active state. In this state, the plurality of cell blocks are sequentially selected in row units by allocating two of the global column selection lines GH0 to GH3 and two of the block selection lines BLK0 to BLK3. All lower bit lines BiBL of the cell blocks selected in row units are selected at the same time, and all the cell transistors of the selected cell blocks in row units through the upper bit line MBL corresponding to the cell blocks selected in the row units. The test is performed by applying a bit line bias to QC). Accordingly, the test time can be further shortened than in the bit line test shown in FIG. 5. While the test for the selected cell blocks is performed, the test for the cell transistors of other cell blocks, that is, the unselected cell blocks, cannot be performed.
    [132] The operation of FIG. 6 is controlled by the controller shown in FIG.
    [133] FIG. 7 is a waveform diagram illustrating another example of the operation during the bit line test for the memory core unit illustrated in FIG. 4.
    [134] In the operation of the bit line test shown in FIG. 7, the column reset voltage line VRST is set to a bit line bias voltage of 5V, and the signal of the column reset signal line COLRST is in an active state. In this state, by allocating two of all four global column select lines GH0 to GH3 and block select lines BLK0 to BLK3, a plurality of cell blocks are arranged in columns (in this example, the upper bit line ( In units of MBL0 or MBL1). All the lower bit lines BiBL of the cell blocks selected in the column unit are selected at the same time, and all the cell transistors of the selected cell blocks in the column unit through the upper bit line MBL corresponding to the cell blocks selected in the column unit. The test is performed by applying a bit line bias to QC). Accordingly, the test time can be further shortened than in the bit line test shown in FIG. 5. While the test for the selected cell blocks is performed, the test for the cell transistors of other cell blocks, that is, the unselected cell blocks, cannot be performed.
    [135] For example, the two block select lines are block select lines BLK0 and BLK2 or BLK1 and BLK3.
    [136] FIG. 8 is a waveform diagram illustrating another example of the operation during the bit line test for the memory core unit illustrated in FIG. 4.
    [137] In the operation of the bit line test shown in FIG. 8, the column reset voltage line VRST is set to a bit line bias voltage of 5V, and the signal of the column reset signal line COLRST is in an active state. In this state, the plurality of cell blocks are selected at the same time by allocating the global column select lines GH0 to GH3 and the block select lines BLK0 to BLK3. All lower bit lines BiBL of the selected cell blocks are simultaneously selected, and a bit line bias is applied to all cell transistors QC of the selected cell block through the upper bit lines MBL corresponding to the selected cell blocks. The test is then performed. Accordingly, the test time can be further shortened than in the bit line test illustrated in FIG. 6 or 7.
    [138] The operation of FIG. 8 is controlled by the controller shown in FIG.
    [139] In practice, among the various test modes described above, the test sequence is selected such that the test time is shortened as much as possible within the range that the total leakage current does not exceed the supply capacity of the stress voltage generating circuit (not shown).
    [140] As described above, according to the nonvolatile semiconductor memory of the present invention, even when scaling of peripheral transistors is difficult, a highly integrated nonvolatile memory can be realized.
    [141] Moreover, in the bit line test, the selection of the respective cell blocks correlates to the selection of the respective column reset transistor regions, so that the time of the test operation can be shortened.
    [142] Additional advantages and modifications will be readily apparent to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described herein. Accordingly, various modifications may be made without departing from the spirit and scope of the general inventive concept as defined by the appended claims and their equivalents.
    权利要求:
    Claims (23)
    [1" claim-type="Currently amended] A first nonvolatile memory cell and a second nonvolatile memory cell each holding data;
    First and second bit lines connected corresponding to the first and second nonvolatile memory cells;
    First and second column select transistors corresponding to the first and second bit lines;
    A first column reset and bit line test transistor having a drain connected to a first node to which the first and second column select transistors are commonly connected;
    A sense amplifier selectively connected to the first node to sense and amplify cell data appearing on the first node; And
    After data of one of the first and second nonvolatile memory cells selected by turning on one of the first and second column select transistors is sensed by the sense amplifier during a first time period, the first column reset and Controlling the bit line test transistor to be turned on to reset the potential of the first node, wherein the first and second column select transistors and the first column reset and bit line test transistor are simultaneously turned on during a second time period. Control circuitry to control to electrically disconnect the sense amplifier from the first node during
    Nonvolatile semiconductor memory comprising a.
    [2" claim-type="Currently amended] The nonvolatile semiconductor memory of claim 1, further comprising a data line connected to the third bit line through a third bit line and a third column select transistor, wherein the sense amplifier is connected to the data line.
    [3" claim-type="Currently amended] The nonvolatile semiconductor memory of claim 1, wherein a ground potential is applied to a source of the first column reset and bit line test transistor during the first period.
    [4" claim-type="Currently amended] The nonvolatile semiconductor memory of claim 2, wherein a ground potential is applied to a source of the first column reset and bit line test transistor during the first period.
    [5" claim-type="Currently amended] The nonvolatile semiconductor memory of claim 1, wherein a ground potential is applied to a source of the first column reset and bit line test transistor during the second period.
    [6" claim-type="Currently amended] The nonvolatile semiconductor memory of claim 2, wherein a ground potential is applied to a source of the first column reset and bit line test transistor during the second period.
    [7" claim-type="Currently amended] The nonvolatile semiconductor memory of claim 3, wherein a ground potential is applied to a source of the first column reset and bit line test transistor during the second period.
    [8" claim-type="Currently amended] The nonvolatile semiconductor memory of claim 4, wherein a ground potential is applied to a source of the first column reset and bit line test transistor during the second period.
    [9" claim-type="Currently amended] 6. The nonvolatile semiconductor memory of claim 5, wherein a positive voltage is equal to a write voltage applied to the first node upon writing data to the nonvolatile memory cells.
    [10" claim-type="Currently amended] 7. The nonvolatile semiconductor memory of claim 6, wherein a positive voltage is equal to a write voltage applied to the first node upon writing data to the nonvolatile memory cells.
    [11" claim-type="Currently amended] 8. The nonvolatile semiconductor memory of claim 7, wherein a positive voltage is equal to a write voltage applied to the first node when writing data to the nonvolatile memory cells.
    [12" claim-type="Currently amended] 10. The nonvolatile semiconductor memory of claim 8, wherein a positive voltage is equal to a write voltage applied to the first node when writing data to the nonvolatile memory cells.
    [13" claim-type="Currently amended] A first nonvolatile memory cell and a second nonvolatile memory cell, each source being connected to a first common node, each holding data;
    A third nonvolatile memory cell and a fourth nonvolatile memory cell, each source being connected to a second common node, each of which holds data;
    First to fourth lower bit lines connected corresponding to the first to fourth nonvolatile memory cells;
    First to fourth lower column select transistors having one end connected to the first to fourth lower bit lines;
    A first upper bit line commonly connected to the other ends of each of the first and second lower column select transistors;
    A second upper bit line commonly connected to the other ends of each of the third and fourth lower column select transistors;
    First and second column reset and bit line test transistors having drains connected to the first and second upper bit lines;
    A sense amplifier selectively connected to one of the first and second upper bit lines to sense and amplify cell data appearing on one of the first and second upper bit lines; And
    After at least one of the first to fourth nonvolatile memory cells selected by turning on at least one of the first to fourth lower column select transistors is sensed by the sense amplifier during a read operation time of cell data, Controlling one of the first and second column reset and bit line test transistors to be turned on to reset the potential of one of the first and second upper bit lines, the first to fourth lower column select transistors, and Control circuitry to control the sense amplifier to electrically isolate the first and second upper bit lines while the first and second column reset and bit line test transistors are turned on simultaneously during a bit line test time
    Nonvolatile semiconductor memory comprising a.
    [14" claim-type="Currently amended] The nonvolatile semiconductor memory of claim 13, wherein a positive voltage is applied to a source of a column reset and a bit line test transistor that is turned on among the first and second column reset and bit line test transistors during the bit line test time.
    [15" claim-type="Currently amended] 15. The nonvolatile semiconductor memory of claim 14, wherein the positive voltage is equal to a write voltage applied to the upper bit lines when writing data to the nonvolatile memory cells.
    [16" claim-type="Currently amended] A first nonvolatile memory cell and a second nonvolatile memory cell, each source being connected to a first common node, each holding data;
    A third nonvolatile memory cell and a fourth nonvolatile memory cell, each source being connected to a second common node, each of which holds data;
    First to fourth lower bit lines connected corresponding to the first to fourth nonvolatile memory cells;
    First to fourth lower column select transistors having one end connected to the first to fourth lower bit lines;
    A first upper bit line connected to the other ends of the first to fourth lower column select transistors;
    A first column reset and bit line test transistor having a drain connected to the first upper bit line;
    A sense amplifier selectively connected to the first upper bit line to sense and amplify cell data appearing on the first upper bit line; And
    After data of at least one of the first to fourth nonvolatile memory cells selected by turning on at least one of the first to fourth lower column select transistors is sensed by the sense amplifier during a read operation time of data, the And turning on a first column reset and bit line test transistor to reset the potential of the first upper bit line, wherein the first to fourth lower column select transistors and the first column reset and bit line test transistors Control circuitry to control the sense amplifier to be electrically isolated from the first upper bit line during simultaneous turn on during a bit line test time
    Nonvolatile semiconductor memory comprising a.
    [17" claim-type="Currently amended] 17. The nonvolatile semiconductor memory of claim 16, wherein a positive voltage is applied to a source of the first column reset and bit line test transistor during the bit line test time.
    [18" claim-type="Currently amended] 18. The nonvolatile semiconductor memory of claim 17, wherein the positive voltage is equal to a write voltage applied to the upper bit lines when writing data to the nonvolatile memory cells.
    [19" claim-type="Currently amended] The memory device of claim 1, wherein each of the nonvolatile memory cells includes a stacked gate in which a floating gate and a control gate are stacked on each other, and the nonvolatile memory cells are connected in a configuration of a memory cell array.
    The memory cell array is divided into a plurality of memory cell blocks in the longitudinal direction of the bit lines,
    And the column reset and bit line test transistors are disposed in an area on one side of the memory cell array.
    [20" claim-type="Currently amended] The memory device of claim 13, wherein each of the nonvolatile memory cells includes a stacked gate in which a floating gate and a control gate are stacked on each other, and the nonvolatile memory cells are connected in a memory cell array.
    The memory cell array is divided into a plurality of memory cell blocks in the longitudinal direction of the bit lines,
    And the column reset and bit line test transistors are disposed in an area on one side of the memory cell array.
    [21" claim-type="Currently amended] 17. The memory device of claim 16, wherein each of the nonvolatile memory cells comprises a stacked gate having a floating gate and a control gate stacked on each other, wherein the nonvolatile memory cells are connected in a memory cell array configuration.
    The memory cell array is divided into a plurality of memory cell blocks in the longitudinal direction of the bit lines,
    And the column reset and bit line test transistors are disposed in an area on one side of the memory cell array.
    [22" claim-type="Currently amended] A memory cell array including a plurality of nonvolatile memory cells arranged in a matrix shape, each of the nonvolatile memory cells having a stacked gate having a floating gate and a control gate stacked thereon, wherein the memory cell array includes a plurality of nonvolatile memory cells in a column direction Split into cell blocks;
    First and second lower bit lines provided in each of the cell blocks, the first and second lower bit lines correspondingly connected to the first and second nonvolatile memory cells which hold data;
    First and second column select transistors provided in each of the cell blocks, the first and second column select transistors being connected to correspond to the first and second lower bit lines;
    An upper bit line commonly provided for the plurality of cell blocks in a column direction, wherein the first and second column select transistors in the cell blocks are commonly connected to the upper bit line;
    A column reset and bit line test transistor having a drain node connected to the upper bit line;
    A sense amplifier selectively connected to the upper bit line to sense and amplify data appearing on the upper bit line; And
    Data of one of the first and second nonvolatile memory cells selected by turning on one of the first and second lower column select transistors in the selected cell block among the plurality of cell blocks is selected during the data read operation time. After being sensed by the sense amplifier through one upper bit line corresponding to a cell block, the column reset and bit line test transistors connected to the one upper bit line are turned on to reset the potential of the upper bit line. To control it,
    The column reset and bit line test transistors connected to the first and second lower column select transistors in the selected cell block and the one upper bit line corresponding to the selected cell block among the plurality of cell blocks Control circuitry to electrically isolate the sense amplifier from the one upper bit line during simultaneous turn on
    Nonvolatile semiconductor memory comprising a.
    [23" claim-type="Currently amended] A memory cell array including a plurality of nonvolatile memory cells arranged in a matrix shape, each of the nonvolatile memory cells having a stacked gate in which a floating gate and a control gate are stacked, the memory cell array having a row direction and a column direction Divided into a plurality of cell blocks;
    First and second lower bit lines provided in each of the cell blocks, the first and second lower bit lines correspondingly connected to the first and second nonvolatile memory cells which hold data;
    First and second column select transistors provided in each of the cell blocks, the first and second column select transistors being connected to correspond to the first and second lower bit lines;
    A plurality of upper bit lines provided in common for the plurality of cell blocks and correspondingly corresponding to columns; wherein the first and second column select transistors in cell blocks within the same column are the plurality of upper bit lines. Is commonly connected to the corresponding one;
    A plurality of column reset and bit line test transistors, wherein a drain node of each of the column reset and bit line test transistors is connected to a corresponding one of the plurality of upper bit lines;
    A sense amplifier selectively connected to the plurality of upper bit lines to sense and amplify data appearing on the upper bit lines; And
    Data of one of the first and second nonvolatile memory cells selected by turning on one of the first and second sub-column selection transistors in a selected cell block among the plurality of cell blocks is stored during the read operation time of cell data. After being sensed by the sense amplifier through one upper bit line corresponding to the selected cell block, the column reset and bit line test transistors connected to the one upper bit line are turned on to apply the potential of the upper bit line. To reset it,
    The column reset and bit line test transistors connected to the first and second lower column select transistors in the selected cell block and the one upper bit line corresponding to the selected cell block among the plurality of cell blocks Control circuitry to electrically isolate the sense amplifier from the one upper bit line during simultaneous turn on
    Nonvolatile semiconductor memory comprising a.
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    同族专利:
    公开号 | 公开日
    US20040047202A1|2004-03-11|
    JP2004103161A|2004-04-02|
    US6816421B2|2004-11-09|
    KR100491912B1|2005-05-27|
    JP3845051B2|2006-11-15|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2002-09-11|Priority to JPJP-P-2002-00265773
    2002-09-11|Priority to JP2002265773A
    2003-03-29|Application filed by 가부시끼가이샤 도시바
    2004-03-18|Publication of KR20040023479A
    2005-05-27|Application granted
    2005-05-27|Publication of KR100491912B1
    优先权:
    申请号 | 申请日 | 专利标题
    JPJP-P-2002-00265773|2002-09-11|
    JP2002265773A|JP3845051B2|2002-09-11|2002-09-11|Nonvolatile semiconductor memory|
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